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Development and Study of Composite Acoustic Resonators with Al/(Al,Sc)N/Mo/Diamond Structure with a High Q Factor in the UHF Range |
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| Authors: | Sorokin B. P. Novoselov A. S. Kvashnin G. M. Luparev N. V. Asafiev N. O. Shipilov A. B. Aksenenkov V. V. |
| Affiliation: | 1.Technological Institute for Superhard and Novel Carbon Materials, 108840, Moscow, Troitsk, Russia ;2.Moscow Institute of Physics and Technology (State University), 117303, Dolgoprudny, Moscow oblast, Russia ; |
| Abstract: | Acoustical Physics - The paper demonstrates for the first time the possibility of using aluminum nitride–scandium as an effective piezoelectric material in composite acoustic resonators on... |
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