| 基于三角形分布光栅的相位测量轮廓术 |
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| 引用本文： | 叶虹呐,曹益平. 基于三角形分布光栅的相位测量轮廓术[J]. 中国激光, 2011, 0(11) |
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| 作者姓名： | 叶虹呐 曹益平 |
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| 作者单位： | 四川大学光电科学技术系; |
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| 基金项目： | 国家863计划(2007AA01Z333); 国家重大专项(2009ZX02204-008); 四川省学术和技术带头人培养基金(07GRC-01)资助课题 |
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| 摘 要： | 相位测量轮廓术凭借其高精度、非接触的优点在现代生活中受到了极大的重视,但其应用却受到正弦光栅复杂制作工艺的限制。根据相位测量轮廓术的基本原理,提出了基于三角形分布光栅的相位测量轮廓术。同正弦光栅相比,三角形分布光栅的制作工艺相对简单,更具有实用意义。对这两种方法的精度进行了比较和分析,并分别在无噪声的理想情况和有噪声的实际情况下,分析了光栅周期、条纹对比度以及物体最大高度对测量精度的影响。通过计算机模拟与实验表明,基于三角形分布光栅的相位测量轮廓术具有较高的精度和可行性。
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| 关 键 词： | 信息光学 光学三维传感 相位测量轮廓术 三角形分布条纹 光栅 相位展开 |
Phase Measuring Profilometry Based on Triangular Pattern Grating |
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| Ye Hongna Cao Yiping. Phase Measuring Profilometry Based on Triangular Pattern Grating[J]. Chinese Journal of Lasers, 2011, 0(11) |
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| Authors: | Ye Hongna Cao Yiping |
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| Affiliation: | Ye Hongna Cao Yiping (Department of Optoelectronics,Sichuan University,Chengdu,Sichuan 610064,China) |
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| Abstract: | Phase measuring profilometry(PMP) has received great attention in modern life with the advantages of high accuracy and non-contact.However,the application of PMP is limited by the complicated manufacturing technique of sinusoidal grating.Based on the basic theory of PMP,the paper presents the PMP based on the triangular-pattern grating,which is of more practical significance because its manufacturing technique is easier compared to the sinusoidal grating.In this paper,the accuracy of the two methods mention... |
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| Keywords: | information optics optical three-dimensional sensing phase measuring profilometry triangular-pattern grating phase unwrapping |
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