Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers |
| |
Authors: | Lifeng Ge |
| |
Affiliation: | (1) Department of Automation, Anhui University, 230039 Hefei, China |
| |
Abstract: | A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers. Project supported by the National Natural Science Foundation of China (Grant No.69974001). |
| |
Keywords: | electrostatic ultrasonic transducer micro air-gap structure dynamic mechanism modelling |
本文献已被 SpringerLink 等数据库收录! |
|