Affiliation: | (1) Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels Ave., 7, Ivanovo, 153000, Russia;(2) Department of Environmental Chemical Engineering, Konyang University, 26 Nae-dong, Nonsan, Chungnam, 320-711, Korea;(3) School of Applied Chemistry and Biological Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon, 305-764, Korea |