X-ray microanalysis of uranium dioxide particles by using low electron beam energy |
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Authors: | V. G. Dyukov E. N. Evstaf’eva V. A. Stebelkov A. A. Tatarintsev V. V. Khoroshilov |
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Affiliation: | 1. “Laboratory for Microparticle Analysis,”, Moscow, Russia 2. Faculty of Physics, M.V. Lomonosov Moscow State University, Moscow, 119991, Russia 3. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, 142432, Russia
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Abstract: | The elemental analysis results of the various size uranium dioxide fragments, performed with a scanning electron microscope (SEM) equipped by X-ray energy dispersive analyzer (INCA x-act, “Oxford Instruments”, Great Britain), are presented. The elemental composition calculation was carried out applying the pre-installed program based on the XPP matrix correction algorithm. It is shown that for the bulky UO2 samples, measured with the varied accelerating voltage in range of 6–20 kV, the uranium concentrations slightly differ (relative uncertainties doesn’t exceed ±2%). The composition of uranium dioxide particles sized up to 0.5 μm can be defined using beam energy of 6 keV with typical for bulky sample accuracy. |
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