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Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface,obtained by Zn ion implantation |
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| Authors: | V N Sokolov O V Razgulina V V Privesentsev D V Petrov |
| Institution: | 1. Faculty of Geology, Lomonosov Moscow State University, Moscow, 119998, Russia 2. Institute of Physics and Technology, Russian Academy of Sciences, Moscow, 117218, Russia 3. Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow, 119998, Russia |
| Abstract: | A computer study of morphological characteristics using AFM images of a self-organized surface nanopore system in the structure of SiO2/Si(100) is performed. The nanopore system is obtained via Zn ion doping with subsequent thermal annealing. AFM images of the nanopore system are studied using the STIMAN 3D software. A correct quantitative estimate is made of the morphology of this nanopore system using a number of parameters (equivalent diameter, area, total area, and shape coefficient). Estimating the morphology of the self-organized surface nanopore system in the structure of SiO2/Si(100) allows us to narrow the possible practical applications of the resulting system in opto- and nanoelectronics. |
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