Determination of copper in ammonium fluoride solutions by extraction and atomic-absorption spectrophotometry |
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| Authors: | Briska M Hoffmeister W |
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| Affiliation: | IBM Laboratories, Component Development, Dept. 3192 D-7030 Boeblingen, Schoenaicher Strasse 220 West Germany. |
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| Abstract: | Extraction with sodium diethyldithiocarbamate, followed by mineralization and atomic-absorption spectroscopy is used to determine down to 10(-7)% Cu in 40% ammonium fluoride solution used in the manufacture of semiconductors. |
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