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Detailed modeling of three-dimensional chemical vapor deposition |
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| Authors: | Alexandre Ern Vincent Giovangigli Mitchell D Smooke |
| Institution: | a CERMICS, ENPC, F-93167, Noisy-le-Grand Cedex, France b CMAP, CNRS, Ecole Polytechnique, F-91128, Palaiseau Cedex, France c Department of Mechanical Engineering, Yale University, New Haven, Connecticut 06520-8284, USA |
| Abstract: | |
| Keywords: | Chemical vapor deposition Gallium arsenide Carbon doping Multicomponent transport Gas-phase chemistry Surface chemistry |
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