Correlation between structure and photoluminescence in amorphous hydrogenated silicon nitride alloys

As-deposited a-SiN_x:H (0.1<x<0.9) thin films prepared by evaporation of silicon under a flow of nitrogen and hydrogen ions exhibit visible photoluminescence at room temperature without any posttreatment. The nitrogen concentration was determined by X-ray photoemission spectroscopy. The structural characterization was performed with Fourier transform infrared absorption spectroscopy. The optical gap was obtained from transmission measurements in the ultraviolet–visible–near infrared range. These studies were correlated to the evolution of the photoluminescence properties.