Fabricating of aspheric micro-lens array by excimer laser micromachining |
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Authors: | Chi-Cheng Chiu Yung-Chun Lee |
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Affiliation: | Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan |
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Abstract: | This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed. |
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