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Temporally resolved laser diagnostic measurements of atomic hydrogen concentrations in RF plasma discharges |
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| Authors: | Bryan L. Preppernau David A. Dolson Richard A. Gottscho Terry A. Miller |
| Affiliation: | (1) Laser Spectroscopy Facility, Department of Chemistry, The Ohio State University, 43210 Columbus, Ohio;(2) Present address: Department of Chemistry, Wright State University, 45435 Dayton, Ohio;(3) Present address: AT&T Bell Laboratories, 07974 Murray Hill, New Jersey |
| Abstract: | Ground-state atomic hydrogen produced in radio-frequency plasma discharges (20 KHz-5 MHz) has been detectedin situ using two-photon absorption laser-induced fluorescence (TALIF). Atomic ground-state concentration measurements have demonstrated excellent spatial resolution in the interelectrode gap of a planar discharge configuration with 10 nsec temporal resolution at all phases of the RF driving voltage waveform. Concentrations were measured in gas mixtures of helium and hydrogen down to 2×1013 H atoms/cm3. |
| Keywords: | Two-photon laser-induced fluorescence (TALIF) laser diagnostic RF plasma discharge |
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