Erosion of solid surface under irradiation by high-power submicrosecond ion beams |
| |
Authors: | O M Stepanova and V P Krivobokov |
| |
Institution: | (1) Department of Physics, King Fahd University of Petroleum and Minerals, Dhahran, 31261, Saudi Arabia;(2) Department of Physics, COMSATS Institute of Information Technology, Islamabad, Pakistan |
| |
Abstract: | The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated
surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics
on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid
surface etching are assessed. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|