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Erosion of solid surface under irradiation by high-power submicrosecond ion beams
Authors:O M Stepanova and V P Krivobokov
Institution:(1) Department of Physics, King Fahd University of Petroleum and Minerals, Dhahran, 31261, Saudi Arabia;(2) Department of Physics, COMSATS Institute of Information Technology, Islamabad, Pakistan
Abstract:The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.
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