用PECVD在低温衬底上制备类金刚石碳膜

本文报道用 RF PECVD在低温衬底上制备了类金刚石碳(DLC)膜.研究了氢稀释、气体压力和 RF 功率对薄膜性质的影响. 用光透射率、红外吸收谱和小角度X射线衍射谱分析了DLC膜的结构和光学性质.结果表明,这样制备的DLC膜是无定形态的,包含了大量的C-H键,具有良好的透明性.厚度为230nm的DLC膜在480nm后的可见光区和近红外区的透过率大于83;,所导出的Tauc光学带隙在2.7eV和3.7eV之间.本文还探讨了应用这种DLC膜作为二次电子发射材料的可能性.

PECVD Amorphous Diamond-like Carbon Films Deposited at Low Substrate Temperatrure

This paper reports diamond-like carbon (DLC) films prepared by using RF (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) at a lower substrate temperature. The effects of hydrogen dilution, gas pressure and RF power on the properties of the films have been investigated. The structural and optical properties of the DLC films are analyzed by utilizing optical transmission, infrared absorption and small angle X-ray diffraction spectroscopy. The results show that the DLC films are in amorphous state, with a certain amount of C-H bonds. The films with a thickness of about 230nm possess a high transparency, which is more than 83% at 480nm and longer wavelengths in the visible and infrared spectral region, and the deduced Tauc optical band gap is in the range of 2.7eV to 3.7eV. The possibility of using these DLC films as secondary electron emission materials have also been explored.