| 减反膜制备工艺及其应用 |
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| 引用本文： | 罗海燕,黄光周,马国欣,朱建明,戴晋福.减反膜制备工艺及其应用[J].真空电子技术,2009(3):23-29. |
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| 作者姓名： | 罗海燕 黄光周 马国欣 朱建明 戴晋福 |
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| 作者单位： | 1. 华南理工大学电信学院,广东,广州,510640
2. 广东肇庆市科润真空设备有限公司,广东,肇庆市,526060 |
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| 摘 要： | 减反膜在现代光学薄膜生产中占有十分重要的地位，其研究依赖于制备工艺。本文结合近几年来国内外研究现状，叙述了几种不同的减反膜制备方法，分析了各种制备方法的工艺特点以及各自的优缺点，如真空蒸镀法、溅射镀法、溶胶一凝胶法等。并提出了相应的改进方法，分析了这些工艺在减反膜制备中的应用前景，为减反膜的制备提供了参考。
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| 关 键 词： | 减反膜 制备工艺 反射率 透射率 |
Anti-Reflective Film Preparation Technology and Its Application |
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| LUO Hai-yan,HUANG Guang-zhou,MA Guo-xin,ZHU Jian-ming,DAI Jin-fu.Anti-Reflective Film Preparation Technology and Its Application[J].Vacuum Electronics,2009(3):23-29. |
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| Authors: | LUO Hai-yan HUANG Guang-zhou MA Guo-xin ZHU Jian-ming DAI Jin-fu |
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| Institution: | LUO Hai-yan , HUANG Guang-zhou ,MA Guo-xin ,ZHU Jian-ming , DAI Jin-fu (1. College of Electronic and Information Engineering, South China University of Technology , Guangzhou 510640, China ; 2. Zhaoqing Kerun Vacuum Equipment Co. Ltd. of Guangdong, Zhaoqing 526060, China) |
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| Abstract: | Anti-reflective film possesses a very important position in modern optical film production industry. Its research is mostly depending on its technology. In this paper, the research progress in anti-reflective film preparation technology is summarized. The merits and drawbacks of these preparation methods, such as vacuum evaporation, sputtering and sol-gel, have been analyzed and compared. The application prospects for anti-reflective film preparation technology are also analyzed, providing a good reference for anti-reflective film preparation. |
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| Keywords: | Anti-reflective film Preparation technology Reflectance Transmission |
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