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Kinetics and Thermodynamics of Surface Steps on Semiconductors |
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| Authors: | Toshio Ogino Hiroki Hibino Yoshikazu Homma |
| Affiliation: | NTT Basic Research Laboratories, Atsugi-shi, Kanagawa 243-0198, Japan |
| Abstract: | |
| Keywords: | silicon surface atomic step (111) surface nanofabrication step bunching step-free surface. |