亚微米AZO光栅及其漫透射分布特性

探讨亚微米掺铝氧化锌(AZO)光栅的漫透射光谱特性。在AZO薄膜上涂布光刻胶,用325nm激光双光束干涉曝光得到掩模图案。将其置于质量分数为0.5%的稀盐酸溶液中湿法刻蚀,制备出周期(780～1280nm)和高度(60～300nm)能独立调控的AZO一维光栅。正入射双向透射分布函数(BTDF)测试结果表明,400～900nm波段内平均镜面透射率随光栅周期增大而降低,与紫外-可见分光光度计测得的结果吻合;同时,周期越大被衍射到30°～80°范围内的漫透射比重和漫透射峰值均越大,而峰位角越小。根据光栅方程对实验结果给出了合理的解释。

Submicron AZO Gratings and Diffuse Transmittance Distribution

Transmittance spectrum distribution of submicron aluminum-doped zinc oxide (AZO) is discussed. A layer of positive photoresist (PR) is spin coated on AZO thin film and PR mask pattern is acquired with two-beam holographic interference exposure of 325 nm laser. Then it is immersed into 0.5% HCl (mass fraction) water solution to form one-dimensional AZO gratings. The periods and heights of the gratings are adjusted independently from each other and vary between 780~1280 nm and 60~300 nm, respectively. Results show that specular transmittance of 400~900 nm decreases rapidly with grating periods increasing. Bidirectional transmittance distribution functions (BTDF) with normal incidence not only verify this result, but also confirm that diffuse transmittance in the angular range of 30°~80° increases accordingly. The larger the period is, the higher the peak of diffuse transmittance is, and the peak position angle decreases slightly, which is consistent with the law of diffraction angular change with periods obtained by grating equation.