薄膜光栅耦合器的研究

在玻璃衬底上制备了周期为0.56μm的薄膜光栅耦合器,用复制法把光栅做在玻璃衬底上。实验中,我们观察到,激光束既可以从光栅的上面(空气区)或下面(衬底区)耦合于波导薄膜内,又可以通过光栅由波导薄膜中耦合出来。调节激光束入射角可以激发不同阶的波导模式。由实验测得的输入耦合效率达66.0±0.5％。 关键词：

A STUDY OF THIN FILM GRATING COUPLER

A grating coupler with a period of 0.56 μm has been built on the glass substrate by duplicating technique from a master grating. It has been experimentally observed that laser beam can be coupled into the waveguide film from above cair, as well as from below (substrate). The mode excited in the waveguide can be varied by varying the angle of incidence of laser beam, and light wave of different diffraction order can also be coupled into guide wave mode. An input coupling efficiency of 66.0±0.5% has been achieved experimentally.