用改进的Van der Pauw法测定方形微区的方块电阻

借助于显微镜放大8×10倍,用目视法将四探针针尖分别控制在样品的面积为100μm×100μm的方形微区的内切圆外四个角区内,利用改进的Van der Pauw法能测定它的方块电阻。测量不受探针游移的影响,无需用测定探针的精确几何位置来进行边缘效应修正。本文利用有限元法对此结论给予证明,并通过金微触点的方块电阻测定得到证实。关键词：

MEASUREMENT OF SHEET RESISTANCE FOR MICROA- REAS BY USING A MODIFIED VAN DER PAUW''S METHOD

The sheet resistance of square microareas with an area of 100 × 100μm² can be determined by using a modified Van der Pauw's method. In this method, the tip positions of the four probes are controlled respectivly at the four corners out side the inner tangential circle of square microareas by direct inspection using a microscope with a magnification of 8 × 10. The measurement results are independent of wanderings of probes and it is not necessary to determine the precise positions of probes in order to make corrections for the boundary effect. These conclusions are proved in this paper by using FEM and have been confirmed by the determination of sheet resistance of gold microbumps.