The use of parallel imaging ESCA to analyse features smaller than 5 microns

Summary In recent years spatially resolved ESCA techniques have become increasingly popular for the analysis of samples with structured surfaces. The chemical information available in ESCA is highly important in surface analysis and there is a great need to realise this information in an imaging mode. The method of parallel imaging ESCA was first implemented on the VG Scientific ESCASCOPE and has more recently been developed for the ESCALAB 220i range of instruments. The Fourier transform electron optics used on these instruments provides the flexibility of real time or accumulated imaging along with the highest spatial resolution ever achieved. Some examples are shown exhibiting image resolution better than 2 microns and spectroscopy from an area of 15 microns (classically defined as a spatial resolution of about 7.5 microns). The use of a focussed monochromator in conjunction with the imaging facility allows fast chemical state imaging. An example of this is shown.