| 用低压反应离子镀技术制备的类金刚石薄膜及其表征 |
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| 引用本文： | 单兆会,高劲松,王彤彤,申振峰,陈红.用低压反应离子镀技术制备的类金刚石薄膜及其表征[J].红外,2011,32(8):8-11. |
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| 作者姓名： | 单兆会 高劲松 王彤彤 申振峰 陈红 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林,长春,130033;中国科学院研究生院,北京,100039
2. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林,长春,130033 |
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| 基金项目： | 辅助蒸发法沉积新型红外增透保护材料GexC1-x薄膜(60478035) |
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| 摘 要： | 以Ar气作为工作气体,CH4作为反应气体,利用低压反应离子镀(RLVIP)技术在Ge基底上成功制备出类金刚石(DLC)薄膜.通过拉曼光谱、Perking Elmer GX型红外光谱仪和Nano Indenter XP型纳米压痕硬度测试计分别表征了类金刚石薄膜的微观结构、光学性能和机械性能.结果表明,类金刚石薄膜(ID ...
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| 关 键 词： | 低压反应离子镀 类金刚石薄膜 拉曼光谱 显微硬度 |
| 收稿时间： | 6/8/2011 11:25:23 PM |
| 修稿时间： | 6/12/2011 1:03:19 AM |
Diamond-like Carbon Films Prepared by RLVIP Technique and Their Characteristics |
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| SHAN Zhao-hui,GAO Jin-song,WANG Tong-tong,SHEN Zhen-feng,CHEN Hong.Diamond-like Carbon Films Prepared by RLVIP Technique and Their Characteristics[J].Infrared,2011,32(8):8-11. |
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| Authors: | SHAN Zhao-hui GAO Jin-song WANG Tong-tong SHEN Zhen-feng CHEN Hong |
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| Institution: | Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences,Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences,Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences,Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences,Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences |
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| Abstract: | When taking Ar gas as the working mixture and taking CH4 as the reactive gas,diamond-like carbon（DLC） films are successfully prepared on Ge substrates by using the low voltage reactive ion plating（RLVIP） technology.The microstructures,optical properties and hardness of the prepared DLC films are characterized by means of Raman spectroscopy,infrared spectroscopy and nano-indentation test technology.The result shows that the prepared DLC films（ID/IG =0.918） have a higher sp3 content,a hardness up to 28.6 GPa and a elastic modulus of 199.5 GPa.The single layer film has a peak transparency of 63.6%and a mean transparency of 62%in the waveband from 8μm to 11.5μm. |
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| Keywords: | RLVIP DLC film Raman spectroscopy nano-hardness |
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