Cross-section preparation for transmission electron microscopy of phases and interfaces in C/BN heterostructures |
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| Authors: | Reznik B Kalhöfer S |
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| Institution: | 1. Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and Hubei Nuclear Solid Physics Key Laboratory, School of Physics and Technology, Wuhan University, Wuhan 430072, China;2. Institute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, 700135 Tashkent, Uzbekistan;3. School of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, China;1. Universitat de les Illes Balears, Cra Valldemossa km. 7.5, Palma de Mallorca 07122, Spain;2. Lappeenranta University of Technology, Material Physics Laboratory, Yliopistonkatu 34, 53850 Lappeenranta, Finland;3. ITMO University, Kronverkskiy av. 49, 191101 St. Petersburg, Russia;1. Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, Universidad de Cádiz, Puerto Real 11510, Spain;2. Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, Escuela Superior de Ingeniería, Laboratorio de Corrosión, Universidad de Cádiz, Puerto Real 11519, Spain;3. Servicio de Microscopía Centro de Investigación, Tecnología e Innovación (CITIUS), Universidad de Sevilla, Av. Reina Mercedes 4b, 41012 Sevilla, Spain;4. Departamento de Ingeniería Mecánica y Diseño Industrial, Escuela Superior de Ingeniería, Universidad de Cádiz, Puerto Real 11519, Spain |
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| Abstract: | A technique is described for the preparation of transmission electron microscopy cross-sectional samples of pyrolytical carbon layers deposited on polycrystalline boron nitride substrates. To solve the problem of different abrasion rates of C and BN a filler material, Si wafers, has been bonded to both sides of the pre-thinned BN substrate. Correspondence between color and thickness of Si wafers facilitates controlled sample thickness reduction during dimpling. The samples prepared by this technique even without ion milling are thin enough for HRTEM studies. |
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