| 一种高灵敏度形状检测新技术 |
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| 引用本文： | 张政,何世平,关锷,伍小平. 一种高灵敏度形状检测新技术[J]. 力学学报, 1995, 27(3): 344-350. DOI: 10.6052/0459-1879-1995-3-1995-440 |
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| 作者姓名： | 张政 何世平 关锷 伍小平 |
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| 作者单位： | 中国科学技术大学光力学实验室 |
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| 摘 要： | 应用光的干涉和衍射理论，系统地阐述了一种高灵敏度形状检测技术的基本原理，并提出了一个新的测试方法，可以消除坐标影响项，从而得到纯等高线条纹图。文中应用该技术，实际测量了带有几种压痕的平板表面的深度分布，分析了测量灵敏度和精度，给出了部分实验结果。
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| 关 键 词： | 形状检测 全息干涉 衍射 全息摄影 |
A NEW HIGH SENSITIVITY TECHNIQUE FOR SHAPE MEASUREMENT |
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| Zhang Zheng,He Shiping,Guan E Wu Xiaoping. A NEW HIGH SENSITIVITY TECHNIQUE FOR SHAPE MEASUREMENT[J]. chinese journal of theoretical and applied mechanics, 1995, 27(3): 344-350. DOI: 10.6052/0459-1879-1995-3-1995-440 |
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| Authors: | Zhang Zheng He Shiping Guan E Wu Xiaoping |
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| Abstract: | The basic principle of a high sensitivity technique for shape measurement hasbeen described according to the theory of optical interferometry and diffraction. A newmethod is presented to eliminate the item containing coordinate variables in the formula,so that the pure contour fringe pattern can be obtained.The technique has been appliedto measure the depth distribution of a plate surface with extruded marks.Finally,thesensitivity and accuracy have been discussed,and some experimental results are provided. |
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| Keywords: | holography shape measurement |
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