The novel nanosecond laser micro-manufacturing of three-dimensional metallic structures

A micro-manufacturing technology is presented which allows the direct forming of three-dimensional metallic microstructures. We replicate micro grid array structures on metallic foil surface. This investigation reveals that three-dimensional metallic microstructures have a high spatial resolution at the micron-level. Numerical simulation results show that the material deformation process is characterized by an ultrahigh strain rate. In addition, this method can fabricate large-area metallic microstructures directly by single pulse. The replication cost is independent of the microstructures complexity. Therefore, laser micro-manufacturing technology will be a potential laser microforming method which is characterized by low-cost, high efficiency. PACS 83.50.Uv; 41.75.Jv; 62.50.+P; 81.20.Hy; 42.62.Cf