| 数字微镜器件(DMD)杂散光特性测试方法及装置 |
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| 引用本文： | 姚雪峰,高毅,龙兵,于晨阳,李文昊,于宏柱,张靖,李晓天. 数字微镜器件(DMD)杂散光特性测试方法及装置[J]. 中国光学, 2022, 0(2): 340-348 |
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| 作者姓名： | 姚雪峰 高毅 龙兵 于晨阳 李文昊 于宏柱 张靖 李晓天 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所;中国刑事警察学院痕迹检验鉴定技术公安部重点实验室;刑事检验四川省高校重点实验室（四川警察学院）;中国电子科技集团公司第十研究所;中国科学院大学 |
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| 基金项目： | 吉林省科技发展计划项目(No.20210203053SF,No.20190302047GX,No.20190201104JC,No.20200404197YY);刑事检验四川高校重点实验室开放课题(No.2019ZD02);国家自然科学基金项目(No.61975255,No.U2006209,No.61505204);公安部科技强警基础工作专项项目(No.GABJC04);辽宁省教育厅重大科研经费项目(No.ZGXJ2020002);中国刑事警察学院科研基金项目(No.D2019036)。 |
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| 摘 要： | 为了获得数字微镜器件(DMD)的真实光学特性,提出了微镜单元杂散光分布测试方法,并搭建实验装置对2×2阵列区域微镜单元的杂散光分布情况进行测试.提出了一种杂散光测试方法,并针对微镜单元尺寸小、配置方式灵活的特点,设计了汇聚光斑大小连续可调的照明系统以及可以对微镜单元清晰成像的成像系统.通过实验得到了2×2阵列区域微镜单...
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| 关 键 词： | 数字微镜器件 微镜单元 杂散光分析 成像特性 精密测量 |
Method and device for testing stray light characteristics of Digital Micro-mirror Device(DMD) |
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| YAO Xue-feng,GAO Yi,LONG Bing,YU Chen-yang,LI Wen-hao,YU Hong-zhu,ZHANG Jing,LI Xiao-tian. Method and device for testing stray light characteristics of Digital Micro-mirror Device(DMD)[J]. Chinese Optics, 2022, 0(2): 340-348 |
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| Authors: | YAO Xue-feng GAO Yi LONG Bing YU Chen-yang LI Wen-hao YU Hong-zhu ZHANG Jing LI Xiao-tian |
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| Affiliation: | (Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Key Laboratory of Trace Testing and Identification Technology of the Ministry of Public Security,Criminal Investigation Police University of China,Shenyang 110035,China;Key Laboratory of Sichuan Higher Education Criminal Science and Technology Laboratory(Sichuan Police College),Luzhou 646000,China;China Electronics Technology Group Corporation(CETC10),Chengdu 610036,China;University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | In order to obtain the true optical characteristics of a Digital Micro-mirror Device(DMD),a test method for the stray light distribution of the micro-mirror unit was proposed and an experimental device was built to test the stray light distribution of a micro-mirror unit in the 2×2 array area.First,a stray light test method is proposed.Then,in view of the small size of the micro-mirror unit and the flexible configuration mode,an illumination system with a continuously adjustable convergent spot size and an imaging system that can clearly image the micro-mirror unit was designed.Finally,the stray light distribution of the micro-mirror unit in the 2×2 array area was obtained through experimentation.The test results show that the reflection en-ergy near the center channel of a single micro-mirror unit is strong,while the reflection energy near the edge is relatively weak.In addition,the micro-mirror unit also reflects part of the energy outside the test area.The maximum absolute stray light intensity of the micro-mirror unit in the test area appears near the central chan-nel,and its gray value is 6.86.The maximum absolute stray light intensity of the micro-mirror unit close to the test area also appears near the central channel,and its gray value is 4.01,which indicates that the stray light near the central channel is strong.The relative intensity of stray light in the test area is relatively weak,which increases sharply from the edge of the test area and reaches the value of 293.5%after about two micro-mirror units,and then decreases sharply. |
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| Keywords: | DMD micro-mirror unit stray light analysis imaging properties precision measurement |
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