Quantification of Auger depth profiles by means of Rutherford backscattering spectrometry |
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| Authors: | Hubert de Rugy Philippe Saliot Roland Pantel |
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| Affiliation: | (1) ISA Riber, Rueil-Malmaison, France;(2) CNET, Meylan, France |
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| Abstract: | Conclusion Due to their complementary character, AES and RBS can give a very rich set of information when they are combined for profiling thin films. The interpretation of data is easier and more accurate when a same simulated structure is fitted successively to the RBS and AES data.
Quantifizierung von Auger-Tiefenprofilen mit Hilfe der Rutherford-Rückstreu-Spektrometrie |
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