New design of a radio-frequency plasma torch |
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Authors: | Toyonobu Yoshida Kunihiko Nakagawa Toshiya Harada Kazuo Akashi |
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Affiliation: | (1) Department of Metallurgy, Faculty of Engineering, The University of Tokyo, Bunkyo-ku, 113 Tokyo, Japan |
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Abstract: | A numerical model has been developed for predicting the two-dimensional flow and temperature fields in a radio-frequency (rf) plasma torch. The method employed here is based on Boulos' model with the exception of the boundary conditions for the electric and magnetic field equations. Calculations have been made for the confirmation of a new sample injection method, which is capable of completely evaporating refractory materials at high feeding rates without interfering with the stability of the plasma. In the newly designed torch, the reagent is radially injected into the hottest part of the plasma through quartz capillary tubes set symmetrically between an inductor coil. Experimental investigations have also been performed for verifying the proper function of the design. These results provide evidence that our radial injection method developed here is more effective in practical processing than the conventional axial injection methods. |
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Keywords: | Radio-frequency plasma temperature and flow fields injection method |
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