Experimental determination of energy resolution and transmission characteristics of an electrostatic toroidal spectrometer adapted to a standard scanning electron microscope |
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| Affiliation: | 1. Technical University Berlin, Optical Institute, Sekr. P 1-1, Strasse des 17. Juni 135, D-10623 Berlin, Germany;2. Moscow State University, Department of Physics, 119899 Moscow, Russia;1. Departamento de Fı́sica de Materiales, Facultad de Quı́mica, UPV-EHU, Apdo. 1072, 20080 Donostia, Spain;2. Centro Mixto CSIC-UPV-EHU and Donostia International Physics Center (DIPC), Paseo Manuel de Lardizabal 4, 20018 Donostia, Spain;1. Daresbury Laboratory, Daresbury, Warrington WA4 4AD, UK;2. Department of Physics and Astronomy, University of Leicester, Leicester LE1 7RH, UK;3. Department of Chemistry, Nanoscience Research Centre, University of Manchester, Manchester M13 9PL, UK;1. Department of Materials Technology, Faculty of Engineering, Chiba University, Yayoi-cho, Inage-ku, Chiba 263-8522, Japan;2. Graduate School of Science and Technology, Chiba University, Yayoi-cho, Inage-ku, Chiba 263-8522, Japan;1. Department of Electrical and Electronic Engineering, ZKU-Faculty of Engineering, Karaelmas University, Merkez Kamps, Zonguldak 67100, Turkey;2. Wolfson Centre for Magnetics Technology, Cardiff University, P.O. Box 925, Cardiff, WA CF24 0YF, UK;1. Department of Physics, La Trobe University, Vic. 3086, Australia;2. Institut fur Technische Physik II, Universität Erlangen-Nürnberg, Erwin-Rommel-Strasse 1, 91058 Erlangen, Germany |
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| Abstract: | The main characteristics of sectorial toroidal energy analyzer for a new electrostatic electron spectrometer adapted to a standard scanning electron microscope are defined and determined experimentally. These transfer characteristics, i.e. intensity-energy response and transmission functions, energy resolution and coupling constant, are needed for spectrometer calibration, registration and energy correction of measured backscattered electron spectra and microtomographic analysis of multilayered structures. The spectrometer response to a monoenergetic primary electron beam and to a continuous energy distribution is discussed. Detector response functions for energy independent and linear energy dependent detectors are considered. For aperture slits of the spectrometer which allow reasonable electron intensities at the detector an energy resolution of about 2.5% is obtained. |
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