RBS investigations of ion beam mixed hard coatings on tool steel

Silicon nitride hard coatings on tool steel produced by ion beam mixing following sputter or vapour deposition were investigated by RBS and Vickers microhardness measurements. Atomic mixing in the coating/steel interface region resulting in an improved adhesion and in a significant increase of the microhardness of the surface layers was found. Ion beam mixing with gas ions and high fluences leads to blistering of the implanted atoms in the silicon nitride layer.