Shack-Hartmann波前传感器在光学检验中的应用

介绍用于光学检测的Shack-Hartmann(S-H)波前传感器，以及相应的检测实验结果。在实验室内，通过与Zygo干涉仪的测量结果对比，得出传感器的测量精度优于/50 RMS(=632.8 nm)。在外场利用星光作为光源，对口径1 m、焦距11 m的望远镜进行了系统波像差检验，测量结果为0.39~0.46RMS之间，并随着俯仰角的增加而增大，主要像差形式为三阶像散。

Application of Shack-Hartmann wavefront sensor in optical testing

Shack-Hartmann (S-H) wavefront sensors were developed for optical test and the corresponding experiment results are introduced. In the laboratory, the test results were compared with Zygo interferometer, which showed that the accuracy of the S-H sensor was better than λ/50 RMS. And using star as light source, the wavefront error of the telescope with 1m diameter and 11m focal length was tested through the S-H sensor. The results show that the wavefront error of the telescope is about 0.39λ~ 0.46λ RMS, and the error inceases as the elevation angle of the telescope increases. The dominating wave-front error is 3rd astigmatism.