| 软X射线多层膜反射镜反射率测量 |
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| 引用本文： | 谷渝秋,淳于书泰,李玉同,张启仁,尤永禄.软X射线多层膜反射镜反射率测量[J].强激光与粒子束,2000,12(1):58-60. |
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| 作者姓名： | 谷渝秋 淳于书泰 李玉同 张启仁 尤永禄 |
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| 作者单位： | 中物院核物理与化学研究所，等离子体物理国家级重点实验室，绵阳621900 |
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| 基金项目： | 中国工程物理研究基础科学研究基金资助课题 |
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| 摘 要： | 采用线状激光等离子体作为软X光源，用具有空间分辨的掠入射光栅谱仪对正入射多层膜反射镜进行了反射率测量。谱仪测谱范围20~40nm，谱分辨0.05nm，测得50层C/Al反射镜在中心波长28.6nm处反射率为22%，带宽约为2.5nm。
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| 关 键 词： | X光多层膜镜 反射率 激光等离子体 |
| 收稿时间： | 1900-01-01; |
MEASUREMENT OF SOFT X-RAY MULTILAYER MIRROR REFLECTANCE |
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| GU Yu-qiu,CHUNYU Shu-tai,LI Yu-tong,ZHANG Qiren,YOU Yong-lu.MEASUREMENT OF SOFT X-RAY MULTILAYER MIRROR REFLECTANCE[J].High Power Laser and Particle Beams,2000,12(1):58-60. |
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| Authors: | GU Yu-qiu CHUNYU Shu-tai LI Yu-tong ZHANG Qiren YOU Yong-lu |
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| Abstract: | Laser-produced line plasmas were used as a broadband source of soft X-rays and a stigmatic grazing incidence grating spectrometer to measure the normal incidence reflectance of concave multilayer mirrors in the 20 ~ 40 nm spectral region. The measurements of the reflectance made on a C/Al multilayer show a little lower than the calculated results and indicate a normal incidence peak reflectance of about 22% at 28.5 nm. |
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| Keywords: | X ray multilayer mirror reflectance laser produced plasmas |
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