A theoretical model of electrostatic ultrasonic transducers with micro air-gap structure
Authors:
Lifeng Ge
Affiliation:
(1) Department of Physics, Anhui University, 230039 Hefei, China
Abstract:
A new plate-on-air-spring model (or called short tube or DK model) for modelling the behaviour of electrostatic air-cuupled ultrasonic transducers is developed and verified by accurate predictions of natural frequencies of a typical transducer with V-grooved backplate.