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Method for absolute calibration of reference plates for interferometric inspection of surfaces |
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| Authors: | E A Rudenchik I E Kozhevatov N P Cheragin E Kh Kulikova E G Bezrukova |
| Institution: | (1) Institute of Terrestrial Magnetism, Ionosphere, and Propagation of Radio Waves, Russian Academy of Sciences, Troitsk, Moscow oblast, Russia;(2) Research Institute of Radiophysics, Nizhni Novgorod, Russia;(3) Yaroslavl Technical University, Yaroslavl, Russia |
| Abstract: | A method for absolute calibration of reference plates of interferometers for measuring surface profiles of optical elements is described. It is based on the solution of the inverse problem of reconstruction of a surface profile from the data of relative measurements of three plates by way of minimizing the goal function. The method takes into account the gravitational sagging of the reference plate and allows one to obtain its profile with an accuracy of ～λ/1000 for λ=6328 Å. The calibration algorithm as well as theoretical calculations and experimental results are presented. |
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