应用多传感器技术测量微孔几何参量

基于多传感器技术，提出了一种将接触式和非接触式传感器集成到坐标测量机上研究微孔几何参量测量的理论和方法，可对喷墨打印机喷嘴、生物医学仪器孔、燃气涡轮叶片的致冷喷口和柴油机喷油器喷孔等微孔进行实时测量。介绍了系统的组成和测量原理，讨论了微孔测量步骤。实验中，以直径0．16mm、深0．9mm的三个柴油机喷油嘴喷孔做测试，根据测量结果，分析了微孔的圆柱度、直径、圆度、直线度和锥度五个特征参量，并对测量系统的重复性和再现性进行了分析，对于微孔加工过程中的质量控制具有指导作用。

Microhole Geometry Measurement Applying Multi-Sensor Technology

Based on multi-sensor technology, a photoelectric inspecting system for form measurement of micro-holes is presented, which can achieve the measurement of micro-holes such as ink-jet printer nozzles, orifices for biomedical device, cooling vents for gas turbine blade, and diesel fuel injector spray holes. In this paper, the composition of the system and the principle of the measurement are introduced, and the measurement procedure is discussed as well. In the experiment, three diesel fuel injector spray holes about 0. 9 mm in depth and 160μm in diameter are taken as samples. According to the results of measurement, five form characteristics including the cylindricity, diameter, roundness, straightness, and taper of the micro-hole are analyzed from the measurement points. The gage repeatability and reproducibility test are conducted to determine the micro-hole form measurement capability and to calculate the tolerance specifications for each characteristic.