GaN薄膜的热导率模型研究

准确预测GaN半导体材料的热导率对GaN基功率电子器件的热设计具有重要意义.本文基于第一性原理计算和经典Debye-Callaway模型,通过分析和完善Debye-Callaway模型中关于声子散射率的子模型,建立了用于预测温度、同位素、点缺陷、位错、薄膜厚度、应力等因素影响的GaN薄膜热导率的理论模型.具体来说,对声...

Thermal conductivity modeling of GaN films

The accurate predicting of thermal conductivity of GaN semiconductors,especially GaN films,is of great importance for the thermal management in electronic devices.In this paper,a theoretical model based on the first-principles calculations and Debye-Callaway model is proposed to predict the thermal conductivity of GaN films,which is a function of temperature,isotope,point defects,dislocations,film thickness,and strain fields.Specifically,the coefficients in our theoretical model that used to capture umklapp scattering and phononisotope scattering are fitted with the data from first-principles calculations,and two sub-models for point defects scattering and dislocation scattering are discussed,respectively.The sub-model of boundary scattering with suppression function is introduced to describe the anisotropy of size effect,and the effect of in-plane strain(perpendicular to polar axis)is also discussed.The comparison between theoretical predictions and experimental data shows that the model performs well roughly in a large temperature range from 300 to 500 K,with an around 20%difference at room temperature.Our predicted temperature dependent thermal conductivity deviates slightly from the measurements,which may result from the lack of high-order phonon scattering in our model,e.g.,four-phonon scattering.Our results also show that the first-principles calculations for GaN overestimates the influence of isotope scattering.We further study the thermal transport properties of GaN film which are influenced by the thickness,dislocation density,and point defect density through using the new theoretical model.Significant reduction of thermal conductivity is found to occur at a film thickness of 10μm,which is consistent with the findings from the first-principles calculations.The isotope and defects including point defects and dislocations are found to have a weak influence on the thermal conductivity when the thickness of GaN film is larger than 100 nm,while the influence becomes significant for the film with and below 100 nm in thickness.In addition,dislocations and point defects start to reduce thermal conductivity significantly when the surface density of dislocations increases to 1010 cm^-2 and point defect density reaches 1018 cm^-3.