| 在线等离子清洗设备控制系统设计 |
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| 引用本文： | 杨静,苗岱,刘畅.在线等离子清洗设备控制系统设计[J].电子工业专用设备,2012,41(1):16-22. |
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| 作者姓名： | 杨静 苗岱 刘畅 |
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| 作者单位： | 中国电子科技集团公司第二研究所,山西太原,030024 |
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| 摘 要： | 作为一种精密干法清洗设备,等离子清洗机可以有效去除IC封装工艺过程中的污染物,改善材料表面性能,增加材料表面能量。与传统独立式的等离子清洗设备相比,在线式等离子清洗设备具有自动化程度高、清洗效率高、设备洁净度高、适应范围广等优点,适用于大规模全自动化生产。
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| 关 键 词： | IC封装 等离子清洗 在线式 控制系统 |
Research on The Controlling System Design of On-line Plasma Cleaning Machine |
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| YANG Jing,MIAO Dai,LIU Chang.Research on The Controlling System Design of On-line Plasma Cleaning Machine[J].Equipment for Electronic Products Marufacturing,2012,41(1):16-22. |
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| Authors: | YANG Jing MIAO Dai LIU Chang |
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| Institution: | (The Second Research Institute of CETC,Taiyuan 030024,China) |
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| Abstract: | As a precision dry cleaning machine,the plasma cleaning has such functions as eliminating contamination effectively,improving material surface properties,and increasing the material surface energy.Compared with the traditional independent plasma cleaning equipment,the on-line plasma cleaning machine has the advantages of high automation,high cleaning efficiency,cleanness,and wide range of application and so on,which is applicable for the mass production.The essay mainly makes introduction of the equipment controlling system design. |
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| Keywords: | IC packaging Plasma cleaning On-line Controlling |
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