| TEL Mark-8轨道T&H-NRC-1-A型温湿度空气调节器原理介绍及故障分析 |
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| 引用本文： | 郭晶磊,周林.TEL Mark-8轨道T&H-NRC-1-A型温湿度空气调节器原理介绍及故障分析[J].电子与封装,2004,4(1):61-64. |
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| 作者姓名： | 郭晶磊 周林 |
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| 作者单位： | 中国电子科技集团公司第58研究所,江苏,无锡,214035 |
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| 摘 要： | 本文介绍了在半导体设备TEL Mark-8中T&H-NRC-I-A型温湿度空气调节器的基本原理及一般故障分析。
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| 关 键 词： | 温度 湿度 冷冻机 蒸发 压缩 凝聚 膨胀 |
The Theory and Trouble Shooting of T&H-NRC-1-A Model Cup Temperature and Humidity Controlled Air Supply System of TEL Mark-8 Clean Track |
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| GUO Jing-lei ZHOU Lin.The Theory and Trouble Shooting of T&H-NRC-1-A Model Cup Temperature and Humidity Controlled Air Supply System of TEL Mark-8 Clean Track[J].Electronics & Packaging,2004,4(1):61-64. |
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| Authors: | GUO Jing-lei ZHOU Lin |
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| Abstract: | TEL Mark-8 Clean Track is the equipment in semiconductor; here, the author introduce the theory and troubleshooting of the T&H-NRC-1-A of TEL Mark-8 Clean Track. |
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| Keywords: | Temperature Humidity Refrigerator Evaporation Compression Condensation Expansion |
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