XRD-Studies of SiC/Si layers on carbon substrates |
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| Authors: | Gerd Treffer Jens Neuhäuser Günter Marx |
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| Affiliation: | (1) Institut für Chemie, Technische Universität Chemnitz-Zwickau, Federal Republic of Germany |
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| Abstract: | Structural investigations of thin films of SiC, SiC with free silicon and various titanium suicides (TiSi2, TiSi and Ti5Si3) are described. The crystal phases have been identified using X-ray diffractometry. The growth of reaction products from surface reactions between silicon and deposited titanium can be observed.Dedicated to Professor Dr. rer.nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday |
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| Keywords: | XRD CVD hard coatings silicides silicon silicon carbide |
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