MEMS矢量水听器灵敏度自动测试系统设计

针对微机电系统(MEMS)矢量水听器声压灵敏度测试中出现的测试步骤单一、测试任务繁重且耗时多,同时手动测量存在不确定的操作误差等问题,在分析矢量水听器灵敏度测试原理和测试过程的基础上,采用AD9850,AD8599,PGA205、单片机MK60DN512ZVLQ110等芯片,设计了集成信号激励源、微弱信号检测、调理以及信号采样和传输等模块的矢量水听器灵敏度自动测试装置。该装置将测试现场的仪器缩小,多模块功能集成,通过与PC上位机连接控制,快速、实时地完成矢量水听器灵敏度测试标定,在节约测试时间的同时,也能快速地完成对水听器的优化改进的验证；此装置体积小、轻便,测试连线简单,方便外场测试,促进MEMS水听器工程化应用。

Design of automatic testing system for sensitivity of MEMS vector hydrophone

Due to the single, heavy and time-consuming testing task and the uncertain errors of manual operation of MEMS vector hydrophone sensitivity testing, this paper uses AD9850, AD8599, PGA205, MK60DN512ZVLQ110 micro-controller chips, to design an auto testing device of MEMS vector hydrophone sensitivity based on the analysis of the testing principle of vector hydrophone sensitivity. This device integrates signal excitation source, weak signal detection, signal conditioning, sampling and transmission module. It shrinks testing instrument, integrates multi module and connects PC to make quick and timely calibration testing of vector hydrophone sensitivity, which not only saves testing time greatly, but also can optimize the hydrophone rapidly. It has the advantages of small size, lightweight and simple testing, which brings convenience to field testing and accelerate engineering application of MEMS vector hydrophone.