大气压He-Ar射频容性放电Ar亚稳态粒子数密度

利用发射光谱法测量大气压He-Ar混合气体射频容性放电中的Ar亚稳态1s5(3s23p54s［3/2］2)粒子数密度。在不同的放电功率和气体组分下测量放电等离子体中的重要参数:气体转动温度、电子激发温度和Ar亚稳态1s5粒子数密度。结果表明:气体温度在不同放电功率及Ar气压在5103 Pa以内时变化不大,范围为300~350 K；电子激发温度随着放电功率的增加而增加,并且在Ar气压为4103 Pa时最大,在放电功率为70 W时达到0.58 eV；1s5粒子数密度随着放电功率以及电子激发温度的增加而增加,在放电功率为70 W、Ar气压为4103 Pa时达到1.53109 cm-3。

Ar metastable particle number density of He-Ar RF capacitive discharge at atmospheric pressure

This article presents the measurement of Ar metastable 1s5(3s23p54s［3/2］2) particle number density in He-Ar mixed gas at atmospheric pressure by the emission spectroscopy of the gas radiofrequency capacitive discharge. The important parameters of discharge plasma, gas rotational temperature, electron excitation temperature, and Ar metastable 1s5 particle number density, are measured at different discharge powers and gas composition. The results show that gas temperature changes little at different discharge power with the content of Ar less than 5103 Pa, and the range is 300-350 K. Electron excitation temperature increases with the increase of discharge power and the maximum is in 4103 Pa Ar admixture in the same discharge power and it is 0.58 eV at 70 W of the discharge power. 1s5 particle number density increases with the increase of discharge power and electron excitation temperature and it is 1.53109 cm-3 at 70 W of the discharge power with 4103 Pa Ar admixture.