利用H3PO4液层侧面红外热像研究YBCO高温超导薄膜的激光辅助刻蚀特性

利用红外热像实时监测系统,获取钇钡铜氧激光辅助化学刻蚀中H₃PO₄液层的侧面红外热像,研究了其溶液温度分布与热对流特性,并对红外监测数据与钇钡铜氧薄膜激光化学刻蚀特性的关系进行了分析.主要实验结论包括:红外灰度图可真实反映溶液的温度分布和热对流情况,为激光化学刻蚀的热环境分析提供有价值的红外监测数据;通过任意时刻钇钡铜氧表面生成热流所到达高度的分布情况和该时刻的红外灰度图,分析出钇钡铜氧薄膜表面各区域的腐蚀启动先后和刻蚀程度差异等重要信息,为钇钡铜氧及其它材料的激光化学刻蚀特性的实时监测提供了一种新的技术手段.

Analysis of Laser Assisted Chemical Etching Properties of YBCO Film by Infrared Real Time Monitoring

An infrared real time monitoring system was designed to obtain thermal images of H_3PO_4 layer profile during laser assisted chemical etching of high temperature superconducting film (YBa_2Cu_3O_ 7-δ film). The temperature distribution and heat diffuse of solution were studied, as well as the relation between infrared monitoring data and YBa_2Cu_3O_ 7-δ laser assisted chemical etching characteristics was analyzed. The major experimental conclusions include: The temperature distribution and heat diffuse of solution can be truly reflected by infrared thermal image, which is valuable for the analysis of thermal circumstance of laser assisted etching; the created heat diffuse height on YBa_2Cu_3O_ 7-δ film surface and corresponding infrared grey-scale can be achieved at any time to analyze the differences between etching starting duration and etching degree of any small regions on YBa_2Cu_3O_ 7-δ film surface, which provides a new method for the real time monitoring of laser assisted etching properties of YBa_2Cu_3O_ 7-δ and other materials.