Image Formation in Low Vacuum SEM |
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Authors: | Bradley L. Thiel |
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Affiliation: | (1) Polymers and Colloids Group, Cavendish Laboratory, University of Cambridge, Cambridge, UK |
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Abstract: | The role of positive gaseous ions in the formation of secondary electron images in low vacuum scanning electron microscopes is discussed. This paper describes the charging processes and related effects that occur during high vacuum imaging of insulators and then discusses the influence of ions on those processes. The ions are responsible for a number of phenomena, including distortion of the electric field above and below the specimen surface due to space charge, removal of excess negative charge from the specimen, alteration of the specimen surface barrier, and scavenging/filtering of the secondary electron emission. The resulting electron-specimen-ion interactions can give rise to interesting contrast effects that are unique to this class of instruments. |
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Keywords: | : Low vacuum SEM charging insulators dielectrics positive ions. |
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