| Abstract: | The three-mirror illuminating system for moiré interferometry consists of a Lloyds mirror and two additional mirrors at right angles to each other. This arrangement makes possible the design of a four-beam moiré interferometer system for a cross-lined specimen grating, to determine the u and v displacement components of the object under test. The design problems, including optimization of dimensions of the optical elements and adjustment by a user, are discussed and analytically solved. The analysis was verified by the construction and laboratory use of the interferometer. |
