Measuring the Electrical Conductivity of Carbon Nanotubes Grown on Sodalime Glass Substrates using Cu as Catalyst

We have studied the electrical resistance of carbon nanotubes (CNTs) grown on sodalime glass using Cu as catalyst at 580°C temperature. The conductivity was measured at room temperature using four point probe technique. The Cu catalyst was coated on glass substrate by using dc magnetron sputtering system and etched by hydrogen (H₂) gas in order to form nanometer sized catalytic particles. Mixture of C₂H₂/H₂/Ar (20:80:100 standard centimeter cubic per minutes) gases were heated at 580°C for growth of CNTs on a glass substrate by using Thermal Chemical Vapor Deposition (TCVD). The temperature dependence of sheet resistance and current-voltage characteristics of the film were measured by a four point probes method. The morphology of the catalyst surface was probed by Atomic Force Microscopy (AFM), and the growth behavior of CNTs was investigated by scanning electron microscopy (SEM).