移相式干涉仪在锥体棱镜角度测试中的应用

为了实时、高精度地测试光学零件，对移相式数字波面干涉仪在锥体棱镜角度测试中的应用进行了研究。通过锥体棱镜二面角偏差计算方法得到了二面角偏差和干涉波面之间的关系，分析了干涉波面的形状与锥体棱镜综合误差的关系，编写了锥体棱镜角度和综合误差测试程序，并且在移相式数字波面干涉仪和ZYGO干涉仪上分别对锥体棱镜进行测试，给出了2者的比较测试结果。结果表明，移相式数字波面干涉仪测量锥体棱镜二面角偏差的误差在0.3″范围内，RMS值的测量误差在λ/50内；提出的方法可实现检测过程的自动化。

Application of phase-shifting interferometer for angle test of CCRs

The application of phase-shifting interferometers for measuring angles of the cone cube reflectors (CCR) is studied so as to realize the real-time and high accuracy test for optical elements. The relationship between the dihedral angle errors of CCRs and the interference pattern is obtained by calculating the dihedral angle errors of CCRs. The relationship between the shape of interference wavefront and the synthetic errors of CCRs is analyzed. A program to test the dihedral angle errors and the synthetic errors of CCRs is designed. After lots of experiments and comparison of the results by the digital phase-shifting interferometer and the ZYGO interferometer,it is proved that,in the program of CCR test,the measurement error of the dihedral angular difference is less than 0.3" and the measurement error of RMS is in λ/50 with the application of digital phase-shifting interferometer.