Quantitative depth distribution of dislocations by planar channeling |
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| Authors: | P. Baeri S.U. Campisano G. Foti E. Rimini S.T. Picraux |
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| Affiliation: | Istituto de Struttura della Materia, Universita di Catania, 95129 Catania, Italy |
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| Abstract: | Planar channeling analysis with MeV He backscattering is shown to give depth profile of the dislocation density with advantages over axial channeling analysis due to the larger dechanneling cross section of dislocations for planar channeling. |
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