| 大尺寸绝对距离测量的现状及发展 |
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| 引用本文： | 王林,赵洪志,赵洋,曹芒,李达成,王佳.大尺寸绝对距离测量的现状及发展[J].光学技术,1997(2). |
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| 作者姓名： | 王林 赵洪志 赵洋 曹芒 李达成 王佳 |
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| 作者单位： | 清华大学精仪系 |
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| 摘 要： | 大尺寸绝对距离测量技术是解决工业生产中大型零件高精度测量的重要手段。本文介绍了该技术的基本原理及国内外发展现状，并对影响测量精度的三个重要因素作了分析和讨论，并预言超短波Ｘ激光、自适应光学及集成光学技术将会在该领域得到广泛应用
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| 关 键 词： | 激光干涉仪，大尺寸测量，绝对距离测量 |
Review on the large scale absolute distance measurement |
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| Wang Lin,Zhao Hongzhi,Zhao Yang,Cao Mang,Li Dacheng,Wang Jia.Review on the large scale absolute distance measurement[J].Optical Technique,1997(2). |
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| Authors: | Wang Lin Zhao Hongzhi Zhao Yang Cao Mang Li Dacheng Wang Jia |
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| Abstract: | To solve the problem of high precision measurement on large scale workpieces, the fundamental principle and the status of both the inner and the abroad on the large scale absolute distance interferometer are introduced. Three important factors, which influence the measurement accuracy, are analyzed. Several techniques including X ray laser, adaptive and integrated optics, which may improve the measurement accuracy, are also given. |
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| Keywords: | laser interferometry large scale measurement absolute distance measurement |
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