| 薄膜型ESR结构分析与优化 |
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| 引用本文： | 韩闯,陈学康,曹生珠,王熙元.薄膜型ESR结构分析与优化[J].科学技术与工程,2009,9(14). |
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| 作者姓名： | 韩闯 陈学康 曹生珠 王熙元 |
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| 作者单位： | 兰州物理研究所表面工程技术国家级重点实验室,兰州,730000 |
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| 摘 要： | 对ESR进行了理论分析,并进行计算机模拟分析。在此基础上提出了两种改进的ESR面型结构。模拟结果表明,最可行和有效的提高元件性能的手段是降低电极间距。文章分析了两种新的面型结构,其中两端固支模型下拉电压降为原来的60%左右。四悬臂梁结构的下拉电压仅为10V左右。
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| 关 键 词： | 模拟 Ansys 等效核电阻（ESR） 下拉电压 |
Simulation Analysis and Optimization For Structure of ESR Wtth Film |
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| HAN Chuang,CHEN Xue-kang,CAO Sheng-zhu,WANG Xi-yuan.Simulation Analysis and Optimization For Structure of ESR Wtth Film[J].Science Technology and Engineering,2009,9(14). |
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| Authors: | HAN Chuang CHEN Xue-kang CAO Sheng-zhu WANG Xi-yuan |
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| Institution: | Lanzhou Institute of Physics;Lanzhou 730000;P.R.China |
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| Abstract: | The theory of the ESR is analysed,and simulated the model.According to this,two structures have been improved.It is obvious by the simulation that reducing the gap between the electrodes is the effective way to reduce the voltage.Two new kinds of ESR have been analysed.One of them is the model with two side adhered to the frame,what's pulling voltage become the 60 percent of the basic,and another model with four cantilever beams need only 10 V as the pull in voltage. |
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| Keywords: | Ansys |
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