微纳米VO2膜层高温相变原位X射线衍射测试方法研究

通过设计、自制加热样品台结合商业X射线衍射仪的小角掠入射衍射模式，开发了微纳米膜层的原位高温相变测试方法，解决了样品表面微纳米膜层材料（厚度 < 10 μm）的高温相变难以原位测量的问题.研究了样品台与膜层表面的温度分布特征，验证了自制加热样品台的控温效果，原位测试了不同温度下二氧化钒（VO₂）膜层的X射线衍射图谱，揭示了VO₂膜层的高温相变行为.

In-situ X-ray Diffraction Test Method for High-temperature Phase Transition of Micro-nano VO2 Films

In order to solve the in-situ measurement of high-temperature phase transition of micro-nano films (< 10 μm thick) on the substrate, in the present work a self-designed heating sample stage and the grazing incidence X-ray diffraction mode of a commercial X-ray diffractometer were skillfully combined, and thus a novel in-situ measurement method of high-temperature phase transition of micro-nano films was proposed.The characteristics of temperature distributions on the surface of the sample stage and the micro-nano films were investigated, and the temperature control effect of the in-house fabricated heating sample stage was hence verified.Finally, the X-ray diffraction (XRD) patterns of the micro-nano vanadium dioxide (VO₂) films at different temperatures were obtained and the high temperature phase transition of micro-nano VO₂ films was clarified.