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高品质光学级单面生长石英晶体的生长技术研究
引用本文:刘盛浦,孙玉坤,郭兴忠,吴兰.高品质光学级单面生长石英晶体的生长技术研究[J].人工晶体学报,2019,48(1):64-69.
作者姓名:刘盛浦  孙玉坤  郭兴忠  吴兰
作者单位:浙江博达光电有限公司,杭州 311305;浙江博达光电材料与器件研究院,杭州 311305;浙江博达光电材料与器件研究院,杭州 311305;浙江大学浙江加州国际纳米技术研究院,杭州 310058
基金项目:国家重点研发计划(2016YFB0401305);青山湖科技城创新载体建设项目
摘    要:采用水热温差法,研发了一种高品质光学级单面生长石英晶体技术,分析了光学级石英晶体单面生长原理和关键技术,并对所制备的光学级单面生长石英晶体的性能进行了测试与表征。研究结果表明:采用单面生长技术能极大地减少石英晶体内部缺陷,制备出的石英晶体具有极高的品质,其中包裹体指标、条纹指标达和光学均匀性分别达到国家标准GB/T7895-2008中的Ia级、1级和A级,达到了目前国家标准中的顶尖水平。

关 键 词:石英晶体  生长工艺  单面生长

Study on Growth Technology of High-quality Unilaterally Grown Optical Grade Quartz Crystal
LIU Sheng-pu,SUN Yu-kun,GUO Xing-zhong,WU Lan.Study on Growth Technology of High-quality Unilaterally Grown Optical Grade Quartz Crystal[J].Journal of Synthetic Crystals,2019,48(1):64-69.
Authors:LIU Sheng-pu  SUN Yu-kun  GUO Xing-zhong  WU Lan
Institution:(Zhejiang Boda Photoelectric Co., Ltd., Hangzhou 311305, China;Zhejiang Boda Photoelectric Material & Device Research Institute, Hangzhou 311305, China;Zhejiang-California International Nanosystems Institute, Zhejiang University, Hangzhou 310058, China)
Abstract:A unilaterally grown technology of high-quality optical grade synthetic quartz crystal was developed by means of hydrothermal method,and the growth principle and key technologies of unilaterally grown technology were analyzed in detail.The properties of obtained unilaterally grown optical grade synthetic quartz crystal were characterized.The results show that the unilaterally grown technology can greatly reduce the defects in quartz crystals.The obtained quartz crystal has excellent quality as the inclusion index,striae index and optical homogeneity reach the Ia,1 and A level according to the national standard GB/T7895-2008,which has reached the top level in the current national standard.
Keywords:quartz crystal  preparation technology  unilaterally grown
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