Si/Ti原子比对TiO_2-SiO_2复合薄膜亲水性能与摩擦磨损性能的影响

采用直流(DC)反应磁控溅射法在玻璃上制备了不同Si/Ti原子比的TiO_2-SiO_2复合薄膜。使用X射线衍射仪(XRD)、场发射扫描电子显微镜(SEM)、X射线光电子能谱仪(XPS)、紫外可见分光光度计、CA-XP150型接触角仪、UMT-2型多功能微摩擦仪,研究了不同Si/Ti原子比的TiO_2-SiO_2复合薄膜微观结构、表面形貌、亲水性能和摩擦磨损性能。结果表明,所制备的纯TiO_2薄膜具有锐钛矿结构,其平均晶粒尺寸为11 nm,TiO_2-SiO_2复合薄膜呈现非晶结构,其粒子尺寸相对减小;随着Si/Ti原子比的增大,薄膜在可见光区的平均透过率从76. 6%增加到84. 3%。当复合薄膜中Si/Ti原子比为1∶2时,薄膜的摩擦系数为0. 11,薄膜具有最佳的亲水性能;在紫外光照射2 h后水接触角降到3. 0°;在黑暗中放置30 h后水接触角略增加到7. 7°。

Effects of Atomic Ratio of Si/Ti on Hydrophilic Properties and Friction and Wear Properties of TiO2-SiO2 Composite Films

TiO 2-SiO 2 composite films with different atomic ratios of Si/Ti were deposited on glass by direct current(DC) reactive magnetron sputtering technique. The microstructure, surface morphology, hydrophilic properties and friction and wear properties of TiO 2-SiO 2 composite films as a function with various atomic of Si/Ti ratios were investigated by using X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, spectrophotometer, CA-XP150 contact angle meter, UMT-2 multi-function micro-friction meter. It was showed that, the prepared pure TiO 2 was polycrystalline anatase phase with an average grain size of 11 nm, and the particle size of the TiO 2-SiO 2 composite films exhibited an amorphous phase was relatively reduced;as the atomic ratio of Si/Ti increases, the average transmittance of the film in the visible light region increased from 76.6% to 84.3%. The film possess the best hydrophilic property among all the grown samples when the atomic ratios of Si/Ti were 1∶ 2 in composite films, the friction coefficient of the composite film was 0.11,the water contact angle of this film decreased drastically to 3.0° after 2 h of UV irradiation and the water contact angle increased slightly to 7.7° after it was remained in dark for 30 h.